摘要 |
An imaging spectral device for use in the spectrum image analysis for performing the spectroscopic analysis of the respective points in two dimensional field is disclosed. The device comprises an imaging spectral device composing a white-light source to illuminate an object to be measured, a tunable filter located in the optical path between the object and the white-light source, a driving mechanism for wavelength scanning of the tunable filter, and a control unit in which scanning rate of transmitting wavelength of the tunable filter is controlled by the above-mentioned driving mechanism in such a manner that the spectral transmittance of the tunable filter integrated within the exposure time becomes desired spectral distribution of the object to be measured.
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