Scanning tip production process for scanning probe microscope, involves exposing material such as photosensitive resist applied on carrier, through a mask of specific shape at certain angle

摘要

A carrier is positioned on a mask of specific shape, such that the exposure section of mask correlates to the tip to be produced or repaired. A material, such as a photosensitive resist applied on the carrier, is exposed through the mask at certain angle, so that the material is hardened and the unexposed material is removed. The carrier with the tip and the mask are then separated from each other. Independent claims are also included for the following: (a) Probe for use in scanning scope microscopy; (b) Usage method of tip; (c) Usage method of probe.