发明名称 MULTIPASS MULTIPHOTON ABSORPTION METHOD AND APPARATUS
摘要 A method of increasing the efficiency of a multiphoton absorption process and apparatus. The method includes: providing a photoreactive composition; providing a source of sufficient light for simultaneous absorption of at least two photons; exposing the photoreactive composition to at least one transit of light from the light source; and directing at least a portion of the first transit of the light back into the photoreactive composition using at least one optical element, wherein a plurality of photons not absorbed in at least one transit are used to expose the photoreactive composition in a subsequent transit.
申请公布号 WO0196961(A2) 申请公布日期 2001.12.20
申请号 WO2001US19125 申请日期 2001.06.14
申请人 3M INNOVATIVE PROPERTIES COMPANY;FLEMING, PATRICK, R.;DEVOE, ROBERT, J.;LEATHERDALE, CATHERINE, A.;BALLEN, TODD, A. 发明人 FLEMING, PATRICK, R.;DEVOE, ROBERT, J.;LEATHERDALE, CATHERINE, A.;BALLEN, TODD, A.
分类号 G03F7/028;B29C67/00;G03F7/20;H01L21/027 主分类号 G03F7/028
代理机构 代理人
主权项
地址