Projektionsapparat zur Abtastbelichtung und Verfahren zur Herstellung einer Mikrovorrichtung unter Verwendung desselben,申请号DE19956023810-传众专利搜索

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发明名称	Projektionsapparat zur Abtastbelichtung und Verfahren zur Herstellung einer Mikrovorrichtung unter Verwendung desselben
摘要
申请公布号	DE69523810(D1)	申请公布日期	2001.12.20
申请号	DE19956023810	申请日期	1995.04.20
申请人	CANON K.K., TOKIO/TOKYO	发明人	UNNO, YASUYUKI
分类号	G03B27/32;G03B27/54;G03F7/20;H01L21/027;(IPC1-7):G03F7/20	主分类号	G03B27/32
代理机构		代理人
主权项
地址

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