Topography parameters interpretation method for periodic surface structures on sample, involves detecting symmetry characteristics of periodic structures, based on spacing of diffraction orders
摘要
申请公布号
DE10027439(A1)
申请公布日期
2001.12.20
申请号
DE20001027439
申请日期
2000.05.29
申请人
TECHNISCHE UNIVERSITAET ILMENAU ABTEILUNG FORSCHUNGSFOERDERUNG UND TECHNOLOGIETRANSFER
