DEVICE FOR DETECTING CHEMICAL SUBSTANCE AND METHOD FOR MEASURING CONCENTRATION OF CHEMICAL SUBSTANCE

摘要

A device for detecting a chemical substance comprising vacuum ultraviolet radiation generating means (5) for generating vacuum ultraviolet radiation for ionizing a sample gas Gs in an ionizing chamber (1) and mass spectrometry means (6) for measuring the time required for a substance accelerated by accelerating the sample gas Gsi ionized by the vacuum ultraviolet radiation to fly.