发明名称 |
Semiconductor processing system |
摘要 |
A semiconductor processing system comprises a first vacuum processing unit and a second vacuum processing unit connected thereto. The first and second vacuum processing units respectively comprise I/O transfer chambers. Casings of the transfer chambers are connected to each other, and a common transfer robot is arranged in the casings. The transfer robot is moved along horizontal guide rails and formed by connecting rails of the transfer chambers. A rail adjusting mechanism is provided to obtain linearity of the horizontal rails.
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申请公布号 |
US2001053324(A1) |
申请公布日期 |
2001.12.20 |
申请号 |
US20010870495 |
申请日期 |
2001.06.01 |
申请人 |
SAEKI HIROAKI;TANIYAMA YASUSHI |
发明人 |
SAEKI HIROAKI;TANIYAMA YASUSHI |
分类号 |
B65G49/07;H01L21/00;H01L21/677;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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