发明名称 METHOD FOR MAKING SUBSTRATES AND RESULTING SUBSTRATES
摘要 The invention concerns a method for making substrates, in particular for optics, electronics, or optoelectronics, comprising an operation which consists in bonding a useful element (10, 16) of a first material on the surface of a support (2), comprising a second material. The invention is characterised in that: it further comprises an operation which consists in depositing an amorphous material (3), on the surface of the support (2), formed with the second material and designed to receive the element consisting of the first material or on the surface of the useful element formed with the first material and designed to be bonded on the support (2); and the second material is less noble than the first material. The invention also concerns a method for making substrates, in particular for optics, electronics or optoelectronics, comprising an operation which consists in bonding a useful element (10) of a first material on a surface of a support (2), comprising a second material. The method is characterised in that the useful element (10) or the support (2) comprises a polycrystalline material at least on its surface designed to be bonded, and it further comprises, prior to the bonding operation, an operation which consists in forming a layer of amorphous material (2), on the surface or surfaces comprising the polycrystalline material.
申请公布号 WO0197282(A1) 申请公布日期 2001.12.20
申请号 WO2001FR01876 申请日期 2001.06.15
申请人 S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES;AUBERTON-HERVE, ANDRE 发明人 AUBERTON-HERVE, ANDRE
分类号 C23C14/14;H01L21/02;H01L21/762;H01L27/12;H01L31/04;(IPC1-7):H01L21/762 主分类号 C23C14/14
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