| 摘要 |
<p>The invention relates to a holder (10) for a cassette (1) for substrates (2), comprising a base plate (3) on which a guide member (4) provided with at least two guides (5) is secured. The cassette (1) is to be positioned between the guides (5), which enable the cassette (1) to be aligned with respect to the base plate (3), and the side (6) of which facing the base plate (3) tapers inwards and downwards. The application of such a holder (10) in an apparatus for manufacturing semiconductor devices is still hampered as a result of incorrectly positioning the holder (10) in said apparatus, leading to damage to the substrates (2) and a lower yield of the manufacturing process.A holder (10) according to the invention is characterized in that the side (7) of the guide member (4) tapers inwards and upwards. By virtue of this measure, the cassette (1) can be positioned more accurately and reproducibly into the holder (10). In this way, damage to substrates (2) is avoided and the yield is high. Preferably, the guide member (4) is mirror symmetrical and comprises, preferably, two separate guide members (4A, 4B), which are mirror symmetrical as well. As a result, the holder (10) can be mounted, adjusted and manufactured in a simple and inexpensive manner.</p> |
