Vibrator for a vibrating gyroscope, vibrating gyroscope using the vibrator, and electronic apparatus using the vibrating gyroscope

摘要

In order to provide a vibrating gyroscope in which variations in the angular-velocity detection sensitivity are not likely to occur even when sharp temperature changes occur, a vibrator (10) for a vibrating gyroscope includes, on one main surface, a first detection electrode (104a) and a second detection electrode (104b), which output a signal containing an angular-velocity signal, wherein a groove (107a) having a predetermined depth is provided between the first detection electrode (104a) and the second detection electrode (104b). As for a vibrator (10) for a vibrating gyroscope of the present invention, since the difference between the resonance frequency and the anti-resonance frequency in a bending vibration mode in the driving direction becomes closer to the difference between the resonance frequency and the anti-resonance frequency in a bending vibration mode in the detection direction, variations in the angular-velocity detection sensitivity are not likely to occur even when sharp temperature changes are given. <IMAGE>