SOI SUBSTRATE AND METHOD AND SYSTEM FOR MANUFACTURING THE SAME,申请号SG19990000695-传众专利搜索

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发明名称	SOI SUBSTRATE AND METHOD AND SYSTEM FOR MANUFACTURING THE SAME
摘要
申请公布号	SG85106(A1)	申请公布日期	2001.12.19
申请号	SG19990000695	申请日期	1999.02.23
申请人	CANON KABUSHIKI KAISHA	发明人	TADASHI ATOJI
分类号	H01L21/306;B01D46/48;F24F3/16;H01L21/00;H01L21/02;H01L21/762;H01L27/12;(IPC1-7):H01L21/762	主分类号	H01L21/306
代理机构		代理人
主权项
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