A method and an apparatus for analyzing trace impurities in gases

摘要

The present invention relates to a method and an apparatus for analyzing trace impurities in gases, which enable to analyze a very small quantity of impurities by only a simple operation, without making the column arrangement or the structure of flow complicated. In the apparatus and the method, when the trace impurities are measured in ppb-sub ppb level by a combined analyzer which is equipped with an atmospheric pressure ionization mass spectrometer to the back of a gas chromatography, a mixed gas of various gases is used as a carrier gas or purified gases added to the gases outflowed from a gas chromatography.