| 摘要 |
<p>Disclosed is an illumination system for use in a scanning exposure apparatus, for example, which includes a hologram, an optical system for projecting light from a light source to the hologram, a slit disposed at a predetermined position where slit-like light is formed by the hologram or at a position adjacent thereto, and an imaging optical system for illuminating a surface to be illuminated, by use of light passing through an opening of the slit. <IMAGE></p> |
