| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a liquid crystal spatial light modulator as a mask for exposure capable of accurately forming the desired mask pattern, even if making design rule to be more minute makes progress. SOLUTION: Reticles 21-23, each comprising a liquid crystal, are stacked to form the liquid crystal spatial optical modulator 2. At this time, the reticles 22, 23 are disposed on the reticle 21 closest to a wafer 6, in such a way that a region present between segments (pixels) of the reticle 21 and causing leakage of light and segments (pixels) of the reticles 22, 23 overlap each other.</p> |
