| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor chip for measuring CDM resistance, a CDM resistance measuring circuit, and a CDM resistance measuring method having a short TAT from design up to the CDM resistance measurement by easily preparing the operation of a CDM test. SOLUTION: First electrode pad 12 to third electrode pad 14 are respectively contacted with first probe pin 31 to third probe pin 33, and a TEG chip 1 is electrically connected to a measuring apparatus 2. A variable voltage power source 25 applies a predetermined voltage and charge an equivalent capacitor C having an electrostatic capacity value equal to that of a device capacitor. After the charging is finished, the charge in the capacitor C is discharged, and a CDM stress is given to a circuit 1 to be evaluated. An ammeter 22 and a control voltage power source 23 measure diode characteristics around the stress, and the CMD resistance of an LSI is judged.
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