SUPPORTING CONTAINER, AND SEMICONDUCTOR MANUFACTURING AND INSPECTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing and inspecting apparatus which can use a control device having a heat radiating fin or the like conventionally used as it is. SOLUTION: A supporting container for supporting a stage substrate includes an outer frame having a nearly cylindrical shape, and a cylinder extended from the bottom of the outer frame and having a diameter smaller than the outer frame.