| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser equipment which requires no complex configuration while the discharge between main discharge electrodes is performed constantly for efficient laser output. SOLUTION: Laser medium gas is discharged/excited with a pair of main discharge electrodes to generate laser beam. Here, there are provided a plurality of preliminary electrolytic dissociation electrodes which, provided in parallel in the length wise direction of the main discharge electrode, preliminarily dissociates the laser medium gas before discharge of the main discharge electrode, and a gas circulation fan for causing laser medium gas stream. The preliminary electrolytic dissociation electrode has such shape as a flow straightener for suppressing disturbance of the laser medium gas stream. |
