| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of regenerating a cryopump in a short time. SOLUTION: When a second cryopanel 7 is heated to 200 deg.K or more by a heater 14, all of the hydrogen is evaporated from the activated carbon and discharged. When the temperature rise of the second cryopanel 7 is 250 deg.K or less, the second cryopanel 7 can be cooled to about 10 deg.K in a short time. Hydrogen can be securely discharged from the second cryopanel 7 and a cryopump 1 can be regenerated in a short time by setting the temperature of the second cryopanel 7 at 200-250 deg.K for regeneration of the cryopump 1.
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