ELECTRODE STRUCTURE AND ITS MANUFACTURING METHOD, ELECTRON-OPTICAL-SYSTEM ARRAY, CHARGED PARTICLE BEAM EXPOSURE APPARATUS, AND MANUFACTURING METHOD OF DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electronic-optical-system array having a plurality of electron lenses. SOLUTION: This electronic-optical-system array has electrode structures 1, 2, and 3 that are arranged along the path of a plurality of charged particle beams, and have a plurality of openings in the path of the plurality of charged particle beams. At least the electrode structure 2 is equipped with a substrate 2a that has the plurality of openings for allowing each of the plurality of charged particle beams to pass, and a plurality of electrodes 10 extending toward the periphery of the plurality of openings from the side of the plurality of openings. In the substrate 2a, at least the surface has an insulation property.