| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable elastic surface wave element which is free from electrode short-circuiting, or the like in a comb-like electrode due to attachment of conductive foreign matters and free from deterioration of characteristic due to discharge between electrodes caused by pyroelectric characteristic of a piezoelectric substrate. SOLUTION: In an elastic surface wave element formed by providing a comb- like electrode 2 on a piezoelectric substrate 1, a protection film 3 of the comb- like electrode 2 is formed by doping silicon with boron.
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