SEMICONDUCTOR-MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately measure temperature by a thermocouple. SOLUTION: In this semiconductor-manufacturing device, a wafer W is placed on a susceptor 4 that is provided in a reaction pipe 1, and is heated by upper and lower lamps 2 and 3 for carrying out a predetermined treatment, and at the same time temperature near the wafer W is measured by a thermocouple 20 where a temperature-sensing contact is provided near the susceptor 4. In this case, a light shielding cover 30 for shielding direct light from the lower lamp 3 is provided in the temperature-sensing contact of the thermocouple 20.