| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum dry pump with improved service life by preventing the deposition of the products at a place easiest to deposit the product in a vacuum dry pump, improved reliability of operation by protecting an exhaust gas treating device, and capable of reducing the equipment cost and the operation cost by reducing the down time of a vacuum exhaust system, and to provide a trapping method thereof. SOLUTION: An automatic products trapping unit 54 for trapping a component among the exhaust gas by at least one of the pressurization, conductance fluctuation and cooling and for eliminating the trapped product for reproduction is provided in at least one exhaust side of each stage of a multistage vacuum dry pump 52.
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