| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal mold for a reticle which is capable of molding the reticle free of video unevenness without the occurrence of such a defect as the collapse of a microlens molding surface by the adhesion of bubbles and impurities. SOLUTION: The method for manufacturing the metal mold for the reticle for manufacture of a diffusion plate used for the reticle, etc., of an optical system has a first process step for forming pyramidal regular concave-convex relief surfaces 4 and 5 on the surface of a mold substrate 1 and a second process step of smoothly rounding the pyramidal vertex parts and ridge line parts of the concave-convex relief surfaces 4 and 5 by depositing thin films 6 and 7 on the concave-convex relief surfaces 4 and 5 by vapor deposition.
|
