| 摘要 |
PROBLEM TO BE SOLVED: To prevent the heating and fluxing of an aperture for cutting off en electron beam during blanking in a high power electron beam device. SOLUTION: In this electron beam device having an aperture 6 for cutting off an electron beam 4 that is deflected by a blanking coil 5, the electron beam 4 is swung during a blanking period, thus sending a planking signal B that is generated by a blanking signal generator 22 to a blanking coil 5 as a blanking signal B'' with vibration where vibration W is added to a pulse top part by passing through vibration-applying equipment 23.
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