| 摘要 |
PROBLEM TO BE SOLVED: To manufacture high-function constitution layers by constituting a device which is applicable to manufacture of flexible disks, coats the surfaces of films with plural layers of thin films by plural vacuum deposition means, is capable of transporting the continuous films, is excellent in productivity and is capable of independently controlling the deposition conditions of the plural deposition means. SOLUTION: The transportation to supply and take up the films F onto a can 4 from a film roll R1 wound to a long size is performed by a film supplying means 2 and a film take-up means 3 and the plural deposition means 5 and 6 are installed to the can 4 along the transporting direction of the films F. Shutters 26 which are opened and closed in synchronization with the intermittent transportation of the films F are disposed between these deposition means. The surfaces of the films F are successively coated with the films according to the transportation while the deposition conditions, such as the vacuum degrees, introducing gas components and temperatures, of the plural deposition means are independently controlled.
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