发明名称 BURN-IN TESTING EQUIPMENT AND METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To eliminate the need for using a thermostatic cell called a BT cell, for keeping an object to be tested at a high temperature in the conventional burn-in test. SOLUTION: There are arranged a heating means, which is brought into contact with a object to be tested to raise the temperature of thereof by heating, a temperature measuring means to measure the temperature of the object to be tested and a temperature adjusting means which controls the heating means, based on the results of the measurement of the temperature measuring means to adjust the test object to be tested to a specified temperature. The heating means is kept in contact with the test specimen through a heat conductive substance. Moreover, after the self-heat generation of the object to be tested is made by electric energization thereof, the temperature measuring means measures the temperature of the object to be tested. In addition to the self-heat generation of the object to be tested, the heating means applies heat to the object to be tested to elevate the object to be tested up to the condition of a prescribed temperature.
申请公布号 JP2001343420(A) 申请公布日期 2001.12.14
申请号 JP20000165283 申请日期 2000.06.02
申请人 NEC CORP;NEC IBARAKI LTD 发明人 MATSUZAWA HAJIME;NAGATSUMA TAKASHI;AKAOGI TSUTOMU
分类号 G01R31/26;G01R31/28;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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