发明名称 SLIP RESISTANT HORIZONTAL SEMICONDUCTOR WAFER BOAT
摘要 <p>A horizontal wafer boat for maintaining semiconductor wafers during wafer processing is disclosed. The wafer boat is configured to reduce the likelihood wafer slip when wafers are heated to processing temperatures of about 1000 °C and above.</p>
申请公布号 WO2001095374(A2) 申请公布日期 2001.12.13
申请号 US2001017444 申请日期 2001.05.30
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