SOFT X-RAY MASK ALIGNMENT SYSTEM

摘要

An alignment system for a soft X-ray lithographic system for aligning a mask with a substrate to be printed with a pattern including a first registration means on the mask and second registration means on the substrate; one of the registration means being a first soft X-ray absorber means of a predetermined form; the other registration means being a second soft X-ray absorber means having a space in it with the same predetermined form, and one of the registration means being carried over a soft X-ray transparent registration window on the mask, the other registration means being carried over a soft X-ray transparent registration window on the substrate.