| 摘要 |
An electrostatic silicone rubber chuck for ion injectors, which comprises a metallic substrate, a first insulating layer, a pattern of conductive trace or traces formed as an electrode of single or dual polarity and a second insulating layer: with at least the second insulating layer being produced from cured matter of a thermally conductive silicone rubber composition comprising the following components (A) to (D); (A) 10 to 69.99 volume % of organopolysiloxanes having an average compositional formula R1aSiO(4-a)/2, wherein R1 groups are the same or different unsubstituted or substituted monovalent hydrocarbon groups and a is a positive number of from 1.90 to 2.05, (B) 30 to 89.99 volume % of a thermally conductive filler, (C) 0.01 to 10 volume % of a fluorine-modified silicone surfactant, and (D) a curing agent in an amount required for curing the composition containing the components (A), (B) and (C), wherein the total volume % of the components (A), (B) and (C) is adjusted to 100.
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