| 摘要 |
An apparatus (138, 200; 400) adapted to clean an exposed surface of a microstructure device (144, 304) such as a disc or head for a disc drive. The apparatus includes a fixture (187, 302) with a mounting surface adapted to receive the microstructure device. A cleaning fluid (140) covers the exposed surface. A slider bearing (146, 340) coupled to a resilient mount (154) flies over the exposed surface. A cleaning line (147, 308) on the exposed surface adjacent the slider bearing is subject to flow of the cleaning fluid. The flow can be generated by relative motion between the device and the slider bearing or generated by a nozzle (338). |
