ELECTRON BEAM GENERATOR AND METHOD OF ELECTRON BEAM IRRADIATION

摘要

An electron beam generator (100) comprises an electron gun (12) for emitting an electron beam, an electron optics system (18) for adjusting the electron beam, a Z-stage (20) for carrying an object (30), and a stage control (34) for moving the Z-stage (20) in the direction of electron beam irradiation. The Z-stage (20) is preferably moved so that the distance between the object (30) and a case (10) enclosing the electron optics system (18) may become substantially equal to the distance between the case (10) with the electron optics system (18) calibrated and a target marker (50).