发明名称 |
System for processing a workpiece |
摘要 |
An apparatus for processing a workpiece in a micro-environment includes a workpiece housing connected to be rotated by a motor. The workpiece housing forms a substantially closed processing chamber where one or more processing fluids are distributed across at least one face of the workpiece by centrifugal force generated during rotation of the housing. A sump is connected to an inlet and an outlet in the chamber. Rotation of the workpiece housing recirculates fluid into the chamber.
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申请公布号 |
US2001050060(A1) |
申请公布日期 |
2001.12.13 |
申请号 |
US20010921840 |
申请日期 |
2001.08.02 |
申请人 |
SEMITOOL, INC. |
发明人 |
CURTIS GARY L.;THOMPSON RAYMON F. |
分类号 |
B08B3/04;H01L21/00;H01L21/3213;(IPC1-7):C23C16/00 |
主分类号 |
B08B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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