CONTROLLING PHYSICAL MOTION WITH ELECTROLYTICALLY FORMED BUBBLES

摘要

A micro-fabricated structure (320) includes a housing (322) defining an actuation chamber (303) with a set of electrodes (304) formed therein. A movable micro-fabricated structure (324) is positioned proximate to the actuation chamber (303). The electrodes (304) cause electrolytic formation of a bubble (310) that produces controlled displacement of the movable micro-fabricated structure (324). The movable micro-fabricated structure (324) may be a flow-controlled, free-standing block valve, a pressure-controlled, free-standing block valve, a free-standing block valve, or a plate (356). In the case of a plate (356), such as a mirror, the plate (356) may be lifted and tilted in a controlled manner. The controlled displacement of the movable micro-fabricated structure (324) may be terminated by evacuating the bubble (310) through a specially shaped escape path, by producing a spark with the electrodes (304), or by electrolytic dissipation of the bubble (310).