| 摘要 |
A continuous treatment apparatus is provided that resists thermal shock and treatment gases and correctly transfers treated objects. An urging mechanism 9 that urges a treated object w is adapted to transfer a treated object w by reciprocating rack member 91 using a pinion 92 in separating compartments 6 between treatment chambers 1, 2, 3, and 4. This arrangement eliminates the need to install rack members 91 and pinion 92 in a severe atomsphere.
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