SURFACE TENSION EFFECT DRYER WITH POROUS VESSEL WALLS

摘要

A processor (2) for rinsing and drying of semiconductor substrates (8) includes a process vessel (4) contained within an outer containment vessel (6). A diluted liquid vapor creates a Marangoni effect flow along the surface of processing liquid (16) contained within the process vessel (4). The process vessel (4) includes porous walls that allow residual chemicals, organic species, and other unwanted materials to flow from the process vessel (4) to the outer containment vessel (6). The porous walls allow for the maintenance of a stable surface tension gradient to sustain a consistent Marangoni force for even drying. Replacement processing fluid (16) is preferably introduced to the process vessel (4) to prevent the build up of organic species in the surface layer of the processing fluid (16).