METHOD FOR MANUFACTURING ALUMINUM NITRIDE SINTERED BODY IN WHICH VIA HOLE IS MADE

摘要

An aluminum nitride sintered body free from crack, having a via hole and a good appearance, and prepared by sintering an aluminum nitride formed body having a through hole for making a via hole with high insolubility and sufficiently densifying the sintered body. One or more through holes for making dummy via holes not used for electrical connection are made around a through hole for making a via hole with high isolability. A conductive paste is placed also in the through holes for making dummy via holes. The aluminum nitride formed body is sintered.