发明名称 |
METHOD FOR MANUFACTURING ALUMINUM NITRIDE SINTERED BODY IN WHICH VIA HOLE IS MADE |
摘要 |
An aluminum nitride sintered body free from crack, having a via hole and a good appearance, and prepared by sintering an aluminum nitride formed body having a through hole for making a via hole with high insolubility and sufficiently densifying the sintered body. One or more through holes for making dummy via holes not used for electrical connection are made around a through hole for making a via hole with high isolability. A conductive paste is placed also in the through holes for making dummy via holes. The aluminum nitride formed body is sintered. |
申请公布号 |
WO0194273(A1) |
申请公布日期 |
2001.12.13 |
申请号 |
WO2001JP04617 |
申请日期 |
2001.05.31 |
申请人 |
TOKUYAMA CORPORATION;YAMAMOTO, REO;KAMIYAMA, YOSHIHIDE |
发明人 |
YAMAMOTO, REO;KAMIYAMA, YOSHIHIDE |
分类号 |
C04B35/581;H01L21/48;H01L23/498;H05K1/03;H05K1/11;H05K3/40;(IPC1-7):C04B35/581 |
主分类号 |
C04B35/581 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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