Power supply amperometry unit for semiconductor examination system, includes integrator to integrate output signal of voltage amplifier, whose output signal is converted into digital signal, after predetermined time

摘要

A D/A converter (71) outputs analog voltage signal corresponding to input digital signal. Current output from D/A converter is input to power supply pin of the test device through an operational amplifier (72) and voltage amplifier. An integrator (83) integrates the output signal of voltage amplifier for a preset time. An A/D converter (85) converts the output signal of integrated circuit into digital signal, after specific time. An Independent claim is also included for semiconductor test system.