发明名称 Method of making a single side coated and final mirror polished wafer
摘要 <p>The method involves treating a semiconducting plate to a double-sided finishing process and then applying a coating to one side of the plate. The plate is then subjected to a second process producing a double-sided finish. The finishing processes are selected from a group of processing methods which include double-sided polishing and double-sided fine grinding.</p>
申请公布号 EP0857542(B1) 申请公布日期 2001.12.12
申请号 EP19980101959 申请日期 1998.02.05
申请人 WACKER SILTRONIC<BR>GESELLSCHAFT FUER HALBLEITERMATERIALIEN AKTIENGESELLSCHAFT 发明人 PIETSCH, GEORG, DR.;SAUTER, BERND, DR.;FEUCHTINGER, ERNST
分类号 B24B37/08;H01L21/02;H01L21/20;H01L21/304;(IPC1-7):B24B37/04 主分类号 B24B37/08
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