| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sucking and fixing device capable of improving a temperature uniformity within a small region of a surface of a sheet sample, as well as having a sufficient sucking force and a releasing property after suspending application of electric voltage (in the case of an electrostatic chuck), without reducing chemical and mechanical properties of a surface such as a projected upper surface to be brought into contact with the sheet sample and introducing excessive gas. SOLUTION: A flat base and a number of projections 5 are provided, the projections being extended in a sucking region on the flat bed, and the sheet sample being sucked to the projections 5. An upper surface 13 of the projections 5 consists of a sample holding surface 14 and a recess 15.</p> |
