| 摘要 |
PROBLEM TO BE SOLVED: To provide a safe and efficient method for removing pollutants adhering to a surface which is capable of treating pollutants adhering to surfaces of a variety of articles such as substrates of electronic devices, e.g. semiconductor substrates, glass substrates for liquid crystals within a short time to remove the pollutants and clean the surfaces. SOLUTION: A treatment liquid produced by dissolving ozone in an organic solvent having 0.6 or higher distribution coefficient to ozone in gas phase is brought into contact with the surface of an object to be treated to which pollutants adhere to remove the pollutants adhering to the surface of the object to be treated. |
