发明名称 WASHING APPARATUS
摘要 PROBLEM TO BE SOLVED: To wide a washing range to be washed and improve washing efficiency by making carbon dioxide into dry ice. SOLUTION: A hollow control cover 7 having an opening 11 at the tip part is attached to a nozzle 2. The opening 11 is made to be a flat rectangular shape and an expansive control chamber 12 extended outward is formed in the cover body 19 and a notch 3 is formed in both side parts in the longitudinal direction of the opening 11. The pressure, the speed, the direction, and the jetted shape of carbon dioxide jetted out a jetting outlet 5 of the nozzle 2 are controlled by a control cover 7, and consequently, the area where carbon dioxide jetted out the opening 11 becomes dry ice can be widened to result in enlargement of the washing range to be washed by one step and in the improvement of the washing efficiency.
申请公布号 JP2001340816(A) 申请公布日期 2001.12.11
申请号 JP20000164428 申请日期 2000.06.01
申请人 ASAHI SUNAC CORP 发明人 TANIGUCHI SHIGERU
分类号 G02F1/13;B08B3/02;H01L21/304;(IPC1-7):B08B3/02 主分类号 G02F1/13
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