METHOD OF PREPARING ANATASE-TYPE TIO2 SINGLE CRYSTAL THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of preparing anatase-type TiO2 single crystal having characteristics such as improved efficiency of photocatalytic reaction through the enhancement of crystallinity. SOLUTION: This method utilizes laser vapor deposition onto a plain single crystal substrate such as SrTiO3 under low pressure oxygen atmosphere (10 mTorr to 100 mTorr) to form an anatase-type TiO2 single crystal thin film having controlled thickness in the range of 10 nm to 2 μm, wherein the temperature of the substrate is controlled in the range of 350 to 600 deg.C, and the pressure of oxygen is controlled in the range of 10 mTorr to 100 mTorr.