| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic washing apparatus easily manufactured by making the size of an oscillator short. SOLUTION: This ultrasonic washing apparatus for washing a substrate transported in a prescribed direction is provided with a washing container 11 for storing a washing liquid in the inside, transportation rollers 14 for transporting the substrate in a manner that the substrate is immersed in the washing liquid in the washing container, and a plurality of vibrating plates 23 installed in the bottom part of the washing container 11 separately in the width direction at right angles to the transportation direction of the substrate and vibrated by oscillators 24 so as to apply ultrasonic vibration to the washing liquid.
|
