MOBILE DEVICE COMPOSED OF HIGHLY RIGID MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a mobile device which has a stage positioning function such as a static pressure fluid bearing device for an aligner, capable of high speed and high accurate positioning as the movement is composed of a high rigid and lightweight material. SOLUTION: The mobile device which has the stage positioning function is composed of the material of which the specific rigidity of a portion or all of the movement is 100 GPa or more.