发明名称 Interconnect for packaging semiconductor dice and fabricating BGA packages
摘要 An interconnect for BGA packages, a BGA package fabricated using the interconnect, and a method for fabricating BGA packages using the interconnect, are provided. The interconnect includes multiple polymer substrates on which patterns of conductors are formed. Each substrate can be used to fabricate a BGA package. The conductors on the substrates include end portions having bonding vias formed therethrough in alignment with access openings in the substrates. During fabrication of the BGA packages, the bonding vias allow the conductors to be bonded to bond pads on semiconductor dice by forming metal bumps on the bonding vias and bond pads. The access openings in the substrates provide access to the bonding vias and bond pads for a bonding tool configured to form the metal bumps. In addition to the bonding vias, the conductors include ball bonding pads configured for attaching ball contacts, such as solder balls, to the conductors and substrates. The completed BGA package includes a substrate adhesively bonded to a semiconductor die; conductors with bonding vias on the substrate; metal bumps in the bonding vias bonding the conductors to bond pads on the die; and an area array of ball contacts attached to the conductors and substrate.
申请公布号 US6329222(B1) 申请公布日期 2001.12.11
申请号 US19990467643 申请日期 1999.12.20
申请人 MICRON TECHNOLOGY, INC. 发明人 CORISIS DAVID;MODEN WALTER
分类号 H01L21/60;H01L23/498;(IPC1-7):H01L21/44;H01L21/48;H01L21/50 主分类号 H01L21/60
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