| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method inspecting whether conditions of breaks are properly formed, in a process forming for a breakline in a laminated body by irradiation of laser. SOLUTION: In processing in which the line for breaking is formed in the laminated body having a laser absorbing layer by irradiation of laser, the inspection method for laser processing conditions is first to measure a light-emitting amount of plasma light-emission produced from a laser irradiated portion of the laminated body by a photo sensor, and then to judge quality of the line for breaking by means of comparing the measured light-emitted amount with a reference value.</p> |
