METHOD FOR FORMING THIN FILM BY INK JET, INK JET UNIT, ORGANIC EL ELEMENT, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To obtain a method for forming a thin film by ink jet in which a thin film exhibiting a high uniformity in the plane of a substrate can be obtained even when the solvent of a liquid being ejected has a high density. SOLUTION: A gas flow tube 5 having a sufficient length is secured to a rear part of an ink jet head 2. Liquid is ejected while blowing out a gas constantly from the tube 5 toward the plane of a substrate 1. Solvent vapor evaporated from a liquid drop placed on the substrate 1 is blown and removed by the gas from the tube 5 immediately after the liquid drop is placed on the substrate 1. The removed gas is not directed toward the region where the liquid drop is placed, and the region where the liquid drop is placed already. According to the arrangement, difference in the drying speed of liquid drop caused by the arranging order of liquid drops is decreased.