| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal oxide precursor solution having excellent storage stability which comprises an aromatic compound solvent - a metal oxide polymer complex where the metal oxide polymer has higher degree of polymerization than a metal oxide oligomer and is structurally well controlled in two dimensional directions based on the surface of the aromatic ring, and to provide a uniform metal oxide thin film having no crack which is formed using the solution. SOLUTION: This metal oxide thin film is obtained by a process comprising the steps of mixing 0.03 to 3.0 mol of a metal salt with 1 L of an aromatic compound solvent containing water in an amount of 0.01 mol to less than 0.1 mol based on 1 mol of the metal salt, heating to hydrolyze the metal salt, adding alcohol solution containing water in an amount of 0.1 mol to 2.0 mol based on 1 mol of the metal salt, mixing and heating to hydrolyze the metal salt into a metal hydroxide, dehydrating and condensing the metal hydroxide, and concentrating to obtain a metal oxide precursor solution. The metal oxide thin film is obtained by coating the precursor solution onto a substrate, drying and heat-treating.
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