发明名称 Nonvolatile memory device and method for manufacturing the same
摘要 A nonvolatile memory device having a lightly doped source and a method for manufacturing the same are provided. In the nonvolatile memory device, a first insulating layer, a floating gate, a second insulating layer and a control gate are sequentially formed on a semiconductor substrate, and a drain, a lightly doped source and a highly doped source are formed around a surface of the semiconductor substrate. At this time, the highly doped source is shallower than the drain without being overlapped by the floating gate. Thus, the integration of the memory cell can be increased, and the trapping of electrons is reduced in the first insulating layer formed between the floating gate and the lightly doped source, to thereby enhance the characteristics of the memory cell.
申请公布号 US6330187(B1) 申请公布日期 2001.12.11
申请号 US19990437801 申请日期 1999.11.10
申请人 SAMSUNG ELECTRONICS, CO., LTD. 发明人 CHOI JEONG-HYUK;KIM JONG-HAN
分类号 H01L21/8247;G11C16/04;H01L21/336;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):G11C16/04 主分类号 H01L21/8247
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